Advances and challenges in dual-tone development process optimization

Fonseca, CarlosCarlosFonsecaSomervell, MarkMarkSomervellScheer, StevenStevenScheerPrintz, WallaceWallacePrintzNafus, KathleenKathleenNafusHatakeyama, ShinichiShinichiHatakeyamaKuwahara, YuheiYuheiKuwaharaNiwa, TakafumiTakafumiNiwaBernard, SophieSophieBernardGronheid, RoelRoelGronheid2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15321Advances and challenges in dual-tone development process optimizationProceedings paper