Pollers, IngridIngridPollersJaenen, PatrickPatrickJaenenVan Roey, FriedaFriedaVan RoeyGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonseDavies, G.G.DaviesHeskamp, B.B.HeskampBakker, H.H.BakkerMcCoo, E.E.McCooMulkens, J.J.MulkensStoeldraijer, J.J.StoeldraijerSytsma, J.J.SytsmaVan der Vleuten, B.B.Van der VleutenVleeming, BertBertVleemingTzviatkov, PlamenPlamenTzviatkovVan Driessche, VeerleVeerleVan DriesscheSlater, S.S.Slater2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2870Introducing 193 nm lithographyProceedings paper