Milojevic, DragomirDragomirMilojevicVan der Plas, GeertGeertVan der PlasBeyne, EricEricBeyneDebacker, PeterPeterDebackerWang, JaneJaneWangKim, Ryan Ryoung hanRyan Ryoung hanKimVelenis, DimitriosDimitriosVelenis2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35585Cost-performance optimisation of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurationsProceedings paperhttps://doi.org/10.1117/12.2552036