Li, YunlongYunlongLiStucchi, MicheleMicheleStucchiVan Huylenbroeck, StefaanStefaanVan HuylenbroeckVan der Plas, GeertGeertVan der PlasBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneCroes, KristofKristofCroes2021-10-252021-10-252018-03https://imec-publications.be/handle/20.500.12860/31182TSV process-induced MOS reliability degradationProceedings paperhttps://ieeexplore.ieee.org/document/8353610/