Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth

Pawlak, BartekBartekPawlakVandervorst, WilfriedWilfriedVandervorstSmith, A.J.A.J.SmithCowern, Nick E.B.Nick E.B.CowernColombeau, B.B.ColombeauPagès, XavierXavierPagès2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11009Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowthJournal article