Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping

Impellizzeri, GiulianaGiulianaImpellizzeriNapolitani, EnricoEnricoNapolitaniBoninelli, SimonaSimonaBoninelliPrivitera, VittorioVittorioPriviteraClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstPriolo, FrancescoFrancescoPriolo2021-10-202021-10-2020121882-0778https://imec-publications.be/handle/20.500.12860/20842Aluminium implantation in germanium: uphill diffusion, electrical activation and trappingJournal article