Mertens, PaulPaulMertensFyen, WimWimFyenVereecke, GuyGuyVereeckeXu, KaidongKaidongXuLauerhaas, J.J.LauerhaasHolsteyns, FrankFrankHolsteynsVan Doorne, PatrickPatrickVan DoorneKesters, ElsElsKestersVos, RitaRitaVos2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7899Damage-free removal of nano-sized particles, heading towards a red brick wallOral presentation