Assessment of mechanical properties in nanotechnology: porous low-k dielectrics, TSVs and bumps

Vanstreels, KrisKrisVanstreelsDe Wolf, IngridIngridDe WolfHangen, UdeUdeHangen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23307Assessment of mechanical properties in nanotechnology: porous low-k dielectrics, TSVs and bumpsMeeting abstract