Lamagna, LucaLucaLamagnaFusi, MatteoMatteoFusiSpiga, SabinaSabinaSpigaFanciulli, MarcoMarcoFanciulliBrammertz, GuyGuyBrammertzMerckling, ClementClementMercklingMeuris, MarcMarcMeurisMolle, AlessandroAlessandroMolle2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19239Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substratesJournal article