Bahrenberg, LukasLukasBahrenbergDanylyuk, SerhiySerhiyDanylyukBrose, SaschaSaschaBrosePollentier, IvanIvanPollentierTimmermans, MarinaMarinaTimmermansGallagher, EmilyEmilyGallagherStollenwerk, JochenJochenStollenwerkLoosen, PeterPeterLoosen2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27787Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultravioletProceedings paper10.1117/12.2280579