Collart, E.J.H.E.J.H.CollartFelch, S.B.S.B.FelchGraoui, H.H.GraouiTallavarjula, S.S.TallavarjulaLindsay, RichardRichardLindsayPawlak, BartekBartekPawlakvan den Berg, J.A.J.A.van den BergCowern, N.E.B.N.E.B.CowernKirby, K.J.K.J.Kirby2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8708Advanced front-end processes for the 45nm CMOS technology nodeOral presentation