Goethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereLorusso, GianGianLorussoHermans, JanJanHermansVan Roey, FriedaFriedaVan RoeyMyers, AlanAlanMyersKim, In SungIn SungKimNiroomand, ArdavanArdavanNiroomandIwamoto, FumioFumioIwamotoStepanenko, NickolayNickolayStepanenkoRonse, KurtKurtRonse2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12204Status of EUV lithography at IMECJournal article