Study of nitrogen impact on VFB-EOT roll-off by varying interfacial SiO2 thickness

Cho, Moon JuMoon JuChoAkheyar, AmalAmalAkheyarAoulaiche, MarcMarcAoulaicheDegraeve, RobinRobinDegraeveRagnarsson, Lars-AkeLars-AkeRagnarssonTseng, JoshuaJoshuaTsengHoffmann, Thomas Y.Thomas Y.HoffmannGroeseneken, GuidoGuidoGroeseneken2021-10-192021-10-192011-080038-1101https://imec-publications.be/handle/20.500.12860/18690Study of nitrogen impact on VFB-EOT roll-off by varying interfacial SiO2 thicknessJournal article