Sijmus, BramBramSijmusVos, IngridIngridVosTerzieva, ValentinaValentinaTerzievaMeuris, MarcMarcMeurisHernandez, Jose LuisJose LuisHernandez2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6825The influence of the selectivity in a 2nd step slurry for a Cu CMP processMeeting abstract