Lavu, SrikanthSrikanthLavuDesmulliez, MarcMarcDesmulliezBegbie, MarcMarcBegbieBall, GeorgeGeorgeBallDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10756Avoiding MEMS failuresJournal article