A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects

Wilson, ChrisChrisWilsonCroes, KristofKristofCroesVan Cauwenberghe, MarcMarcVan CauwenbergheTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerHorsfall, AltonAltonHorsfallO'Neill, AnthonyAnthonyO'Neill2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16545A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnectsJournal articlehttp://stacks.iop.org/0268-1242/24/115018