De Smedt, FrankFrankDe SmedtVinckier, ChrisChrisVinckierCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtMeuris, MarcMarcMeurisGilis, GrietGrietGilisHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3371Ultra-thin oxide growth on silicon using ozonated solutionsProceedings paper