Wafer scale integration of MX2 based NMOS only ring oscillators on 300 mm wafers

Schram, TomTomSchramCeliker, HikmetHikmetCelikerSmets, QuentinQuentinSmetsAsselberghs, IngeIngeAsselberghsKar, Gouri SankarGouri SankarKarMyny, KrisKrisMyny2023-06-152022-10-252023-06-1520222161-4636WOS:000865852700022https://imec-publications.be/handle/20.500.12860/40611Wafer scale integration of MX2 based NMOS only ring oscillators on 300 mm wafersProceedings paper10.1109/SNW56633.2022.9889048978-1-6654-5979-2WOS:000865852700022