Integration and electrical characterization of carbon nanotube bundles for application as interconnects

Chiodarelli, NicoloNicoloChiodarelliArstila, KaiKaiArstilaLi, YunlongYunlongLiCott, DaireDaireCottRichard, OlivierOlivierRichardHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16859Integration and electrical characterization of carbon nanotube bundles for application as interconnectsMeeting abstracthttp://www.mam-conference.org/