Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performance

Gorhad, KujanKujanGorhadSharon, OfirOfirSharonDmitriev, VladimirVladimirDmitrievCohen, AviAviCohenvan Haren, RichardRichardvan HarenRoelofs, ChristianChristianRoelofsCekli, H.E.H.E.CekliGallagher, EmilyEmilyGallagherLeray, PhilippePhilippeLerayBeyer, DirkDirkBeyerTrautsch, ThomasThomasTrautschSteinert, SteffenSteffenSteinert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26657Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performanceProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2502514