Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns

Clerix, Jan-WillemJan-WillemClerixMarques, EstebanEstebanMarquesSoethoudt, JobJobSoethoudtDelabie, AnneliesAnneliesDelabie2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34917Kinetic modeling of Ru area-selective atomic layer deposition in nanopatternsMeeting abstract