Ritzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramBury, ErikErikBurySpessot, AlessioAlessioSpessotCaillat, ChristianChristianCaillatSrividya, VidyaVidyaSrividyaSebaai, FaridFaridSebaaiMitard, JeromeJeromeMitardRagnarsson, Lars-AkeLars-AkeRagnarssonGroeseneken, GuidoGuidoGroesenekenHoriguchi, NaotoNaotoHoriguchiFazan, PierrePierreFazanThean, AaronAaronThean2021-10-212021-10-2120130038-1101https://imec-publications.be/handle/20.500.12860/23001Low-power DRAM-compatible replacement gate high-k/metal gate stacksJournal article