Armini, SilviaSilviaArminiLi, MuyangMuyangLiSwerts, JohanJohanSwertsSiew, Yong KongYong KongSiewCaluwaerts, RudyRudyCaluwaertsMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetMoussa, AlainAlainMoussaLeunissen, PeterPeterLeunissen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20307Evaluation of wet Cu seed deposition to enable downscaling damascene metallizationMeeting abstract