Channam, Venkat Sunil KumarVenkat Sunil KumarChannamIacovo, SerenaSerenaIacovoWalsby, EdwardEdwardWalsbyBelov, IgorIgorBelovJourdain, AnneAnneJourdainSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezBeyne, EricEricBeyne2024-03-252023-09-032023-09-072024-03-2520232473-2001WOS:001004185500104https://imec-publications.be/handle/20.500.12860/42453Low temperature SiCN as dielectric for hybrid bondingProceedings paper10.1109/EDTM55494.2023.10103036979-8-3503-3252-0WOS:001004185500104