Electro-optic modulation in silicon nitride photonic integrated circuits by means of ALD ZnO overlays

Hermans, ArturArturHermansVan Daele, MichielMichielVan DaeleDendooven, JoliernJoliernDendoovenClemmen, StephaneStephaneClemmenDetavernier, ChristopheChristopheDetavernierBaets, RoelRoelBaets2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28488Electro-optic modulation in silicon nitride photonic integrated circuits by means of ALD ZnO overlaysProceedings paperhttps://www.ecio-conference.org/program/