Verdonck, PatrickPatrickVerdonckDelabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsFarrell, LLFarrellBaklanov, MikhaïlMikhaïlBaklanovTielens, HildeHildeTielensVan Besien, ElsElsVan BesienWitters, J.J.WittersNyns, LauraLauraNynsVan Elshocht, SvenSvenVan Elshocht2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20051Fundamental study of atomic layer deposition in and on porous low-k filmsProceedings paper