Hantschel, ThomasThomasHantschelZimmer, JerryJerryZimmerSchulze, AndreasAndreasSchulzeEyben, PierrePierreEybenTsigkourakos, MenelaosMenelaosTsigkourakosRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19042Calibrated boron doped tip fabricationProceedings paper