Understanding EM-degradation mechanisms in metal heaters used for Si Photonics applications

Croes, KristofKristofCroesSimons, VeerleVeerleSimonsCherman, VladimirVladimirChermanOprins, HermanHermanOprinsAbsil, PhilippePhilippeAbsilGlabman, AaronAaronGlabmanEric, WilcoxWilcoxEric2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32764Understanding EM-degradation mechanisms in metal heaters used for Si Photonics applicationsProceedings paperhttps://ieeexplore.ieee.org/document/8720604