Detavernier, C.C.DetavernierVan Meirhaeghe, R. L.R. L.Van MeirhaegheMaex, KarenKarenMaexCardon, F.F.Cardon2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5251Silicide engineering: influence of alloying elements on CoSi2 nucleationProceedings paper