Oei, Y. S.Y. S.OeiSpiekman, L. H.L. H.SpiekmanGroen, F. H.F. H.GroenMoerman, IngridIngridMoermanMetaal, E. G.E. G.MetaalPedersen, J. W.J. W.Pedersen2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/792Novel RIE-process for high quality InP-based waveguide structuresProceedings paper