Seidl, KarstenKarstenSeidlTorfs, TomTomTorfsDe Maziere, PatrickPatrickDe MaziereVan Dijck, GeertGeertVan DijckCsercsa, RichardRichardCsercsaDombovari, BalazsBalazsDombovariNurcahyo, YohanesYohanesNurcahyoRamirez, HernandoHernandoRamirezVan Hoof, ChrisChrisVan HoofVan Hulle, MarcMarcVan HulleOrban, GuyGuyOrbanPaul, OliverOliverPaulUlbert, IstvanIstvanUlbertPereira Neves, HerculesHerculesPereira NevesRuther, PatrickPatrickRuther2021-10-182021-10-1820100013-5585https://imec-publications.be/handle/20.500.12860/17965Control and data acquisition software for microprobe arrays with electronic depth controlJournal article