Correlation between the growth-per-cycle and the surface OH group concentration in the AIMe3/H2O ALD process

Puurunen, RiikkaRiikkaPuurunen2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9474Correlation between the growth-per-cycle and the surface OH group concentration in the AIMe3/H2O ALD processMeeting abstract