A hybrid long wavelength IR sensor based on a linear array of poly-SiGe uncooled microbolometers with a CMOS readout

Kavadias, SpyrosSpyrosKavadiasDe Moor, PietPietDe MoorGastal, MartinMartinGastalHendrickx, N.N.HendrickxWirix, FilipFilipWirixVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4464A hybrid long wavelength IR sensor based on a linear array of poly-SiGe uncooled microbolometers with a CMOS readoutOral presentation