Poly-silicon wet removal for replacement gate integration scheme: impact of process parameters on the removal rate

Sebaai, FaridFaridSebaaiVeloso, AnabelaAnabelaVelosoClaes, MartineMartineClaesDevriendt, KatiaKatiaDevriendtAbsil, PhilippePhilippeAbsilMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17964Poly-silicon wet removal for replacement gate integration scheme: impact of process parameters on the removal rateMeeting abstract