Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

Hantschel, ThomasThomasHantschelTsigkourakos, MenelaosMenelaosTsigkourakosZha, LichenLichenZhaNuytten, ThomasThomasNuyttenParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/26690Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterizationJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716300946