Vohra, AnuragAnuragVohraKhanam, AfrinaAfrinaKhanamSlotte, JonatanJonatanSlotteMakkonen, IljaIljaMakkonenLoo, RogerRogerLooPourtois, GeoffreyGeoffreyPourtoisVandervorst, WilfriedWilfriedVandervorst2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32220Evolution of phosphorus-vacancy clusters in germaniumMeeting abstracthttps://www.european-mrs.com/monolithic-and-heterogeneous-integration-advanced-materials-devices-silicon-emrs