Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardMerckling, ClementClementMercklingConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25278Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approachMeeting abstract