Design and pitch scaling for affordable node transition and EUV insertion scenario

Kim, Ryan Ryoung hanRyan Ryoung hanKimRyckaert, JulienJulienRyckaertRaghavan, PraveenPraveenRaghavanSherazi, YasserYasserSheraziDebacker, PeterPeterDebackerTrivkovic, DarkoDarkoTrivkovicGillijns, WernerWernerGillijnsTan, Ling EeLing EeTanDrissi, YoussefYoussefDrissiBlanco, VictorVictorBlancoBekaert, JoostJoostBekaertMao, MingMingMaoLariviere, StephaneStephaneLariviereMcIntyre, GregGregMcIntyre2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28684Design and pitch scaling for affordable node transition and EUV insertion scenarioProceedings paper10.1117/12.2257885