Khalilov, UmedjonUmedjonKhalilovPourtois, GeoffreyGeoffreyPourtoisHuygh, StijnStijnHuyghvan Duin, A.C.T.A.C.T.van DuinNeyts, E.C.E.C.NeytsBogaerts, AnnemieAnnemieBogaerts2021-10-212021-10-2120131932-7447https://imec-publications.be/handle/20.500.12860/22595New mechanism for oxidation of native silicon oxideJournal articlehttp://pubs.acs.org/doi/abs/10.1021/jp400433u