Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists

Lawrie, KirstenKirstenLawrieBlakey, IdrissIdrissBlakeyBlinco, JamesJamesBlincoGronheid, RoelRoelGronheidJack, KevinKevinJackPollentier, IvanIvanPollentierLeeson, MichaelMichaelLeesonYounkin, ToddToddYounkinWhittaker, Andrew K.Andrew K.Whittaker2021-10-192021-10-1920110969-806Xhttps://imec-publications.be/handle/20.500.12860/19253Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresistsJournal article