Iacopi, FrancescaFrancescaIacopiAlves Donaton, RicardoRicardoAlves DonatonCoenegrachts, BartBartCoenegrachtsKomiya, TakayukiTakayukiKomiyaStruyf, HerbertHerbertStruyfLepage, MurielMurielLepageVan Aelst, JokeJokeVan AelstBoullart, WernerWernerBoullartDe Roest, DavidDavidDe RoestVos, IngridIngridVosBaklanov, MikhaïlMikhaïlBaklanovVereecke, GuyGuyVereeckeVan Hove, MarleenMarleenVan HoveStucchi, MicheleMicheleStucchiTokei, ZsoltZsoltTokeiMeynen, HermanHermanMeynenBremmer, J. N.J. N.BremmerVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5359Studies on XLK film characterization and integration in copper damascene processesProceedings paper