Conard, ThierryThierryConardFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorstReading, M.M.ReadingVan den berg, J.J.Van den bergVan Elshocht, SvenSvenVan ElshochtSchram, TomTomSchramAdelmann, ChristophChristophAdelmannDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13552Physical characterization of the metal/high-k layer interaction upon annealingProceedings paper