Single exposure EUV block downscaling for metal pitches below 32nm

Franke, Joern-HolgerJoern-HolgerFrankeColsters, PaulPaulColstersBekaert, JoostJoostBekaertHendrickx, EricEricHendrickxWittebrood, F.F.WittebroodPathak, AbhinavAbhinavPathakSchiffelers, GuidoGuidoSchiffelers2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28351Single exposure EUV block downscaling for metal pitches below 32nmProceedings paperhttp://www.aot.uni-erlangen.de/fileadmin/aot/img/events/2017/FraunhoferIISB_Flyer_15th-Lithography-Workshop-2017.pdf