Blachut, GregoryGregoryBlachutSirard, StephenStephenSirardMaher, MichaelMichaelMaherAsano, YusukeYusukeAsanoSomeya, YasunobuYasunobuSomeyaLane, AustinAustinLaneDurand, WilliamWilliamDurandGronheid, RoelRoelGronheidHymes, DianeDianeHymesEllison, ChristopherChristopherEllisonWillson, GrantGrantWillson2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26351Directed self-assembly of silicon-containing block copolymers for 20nm lithographyOral presentation