Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

De Coster, J.J.De CosterTilmans, HarrieHarrieTilmansden Toonder, J.M.J.J.M.J.den Toondervan Beek, J.T.M.J.T.M.van BeekRijks, T.G.S.M.T.G.S.M.RijksSteeneken, P.G.P.G.SteenekenPuers, BobBobPuers2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10290Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradientsJournal article