Le, Quoc ToanQuoc ToanLeArslan, EsenEsenArslanRip, JensJensRipDe Coster, HanneHanneDe CosterVerdonck, PatrickPatrickVerdonckRadisic, DunjaDunjaRadisicSchleicher, FilipFilipSchleicherVaesen, IngeIngeVaesenConard, ThierryThierryConardAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2023-10-112023-08-202023-10-1120232590-0072WOS:001042681800001https://imec-publications.be/handle/20.500.12860/42366Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutionsJournal article10.1016/j.mne.2023.100208WOS:001042681800001SODIUM PERIODATEMECHANICAL PLANARIZATIONRUSLURRYRUCMP