Circuit and product level assessment of emerging fully depleted channel devices: FinFET and UTBOX-SOI

Badaroglu, MustafaMustafaBadarogluDehan, MorinMorinDehanGarcia Bardon, MarieMarieGarcia BardonMiranda Corbalan, MiguelMiguelMiranda CorbalanZuber, PaulPaulZuberSchuddinck, PieterPieterSchuddinckMallik, ArindamArindamMallikMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkest2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20325Circuit and product level assessment of emerging fully depleted channel devices: FinFET and UTBOX-SOIProceedings paper