Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate

Pawlak, BartekBartekPawlakDuffy, RayRayDuffyJanssens, TomTomJanssensVandervorst, WilfriedWilfriedVandervorstSeveri, SimoneSimoneSeveriRichard, OlivierOlivierRichardBenedetti, AlessandroAlessandroBenedettiEyben, PierrePierreEybenColombeau, B.B.ColombeauCowern, N.E.B.N.E.B.CowernCamillo-Castillo, R.A.R.A.Camillo-CastilloJones, K.S.K.S.JonesAboy, M.M.Aboy2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11008Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gateProceedings paper