De Messemaeker, JoJoDe MessemaekerPut, StijnStijnPutNelis, DanielDanielNelisVan den bosch, JeroenJeroenVan den boschStrauven, YvanYvanStrauvenLippens, PaulPaulLippensSinapi, FabriceFabriceSinapiOng, PatrickPatrickOngDevriendt, KatiaKatiaDevriendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11957Impact of ceria properties and CMP parameters on STI CMP performanceProceedings paper