Feature proximity errors on mask: assessment results of commercially obtained reticles

Jonckheere, RikRikJonckheerePotoms, GoedeleGoedelePotomsPhilipsen, VickyVickyPhilipsen2021-10-152021-10-152003-01https://imec-publications.be/handle/20.500.12860/7705Feature proximity errors on mask: assessment results of commercially obtained reticlesProceedings paper